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Queensgate Nanopositioning Devices & Sensors | Nanopositioning Stages | Prior
Prior NPS-X-15A/NPS-X-15B 薄型快速15微米載物台
Low Profile Fast 15 Micron Stage
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| 產品說明 | ||
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NPS-X-15A / NPS-X-15B 薄型快速15微米載物台最初設計用於高速，超精密MR磁頭和磁盤驅動器測試。 其小巧的體積和毫秒級的響應時間，對於高可靠性和高生產量應用的最佳選擇，低位移質量和高剛度提供了極高的頻寬，精密的內部電容式傳感器設計可在超過16微米的範圍內提供內奈米級位移測量和閉環反饋。 NPS-X-15A（不銹鋼）/ NPS-X-15B（鋁）與Queensgate的數位閉環控制器結合使用，可以實現毫秒級的響應和穩定時間。
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| 技術規格 |
| Parameter | Symbol | Value | Units | Comments |
| Static physical | ||||
| Material | Stainless steel | |||
| Size | 60 L x 40 W x 13.5 H | mm | ||
| *Closed Loop Range | dθp·max | Typical:± 10.5 | μm | |
| * Open Loop Range | dθp·max | Minimum:± 7.5 Typical:± 8 | μm | |
| *Scale factor error (1σ) | δbx1 | Typical:0.1 | % | |
| *Resonant frequency: 0g load | f0·0 | Minimum:3000 Typical:3500 | Hz | |
| 50g load | f0.015 | Typical:2500 | Hz | |
| 200g load | f0·200 | Typical:1500 | Hz | |
| Maximum load | Maximum:3 | kg | Note 1 | |
| Dynamic physical (Typical values) | ||||
| Loop setting | Note 2 | |||
| *3dB Bandwidth | Bx·p | Fast:450 Medium:140 Slow:60 | Hz | |
| *Small signal settle time | txs·s | Fast:1.7 Medium:4.3 Slow:25 | ms | Note 3 |
| *Position noise (1σ) | δxp·n | Fast:0.1 Medium:0.06 Slow:0.05 | nmrms | Note 4 |
| Error terms | ||||
| *Hysteresis (peak to peak) | δxp·hyst | Typical:0.005 Maximum:0.02 | % | Note 5 |
| *Linearity error (peak) | δxp·lin | Typical:0.005 Maximum:0.01 | % | Note 6 |
| Rotational error | Typical:1 Maximum:5 | μradians | Note 7 | |
| Rotational error | Typical:1 Maximum:5 | μradians | Note 7 | |
| Rotational error | Typical:1 Maximum:5 | μradians | Note 7 | |
| 外觀尺寸 |
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| 產品資訊 |
