选择你的语音
產品服務專線：04-27080265 / 台中
02-89924292 / 台北
02-89924292 / 台北
Queensgate Nanopositioning Devices & Sensors | Nanopositioning Sensors | Prior
Prior NX系列 奈米傳感器
Nanopositioning Sensors
產品特色
FEATURES >> NanoSensors – NX Series
NX Series Capacitive Sensors
- 亞奈米級位置解析度
- 零遲滯現象
- 線性誤差低至 0.02%
- 頻寬高達 10 kHz
- 高熱穩定性結構（提供超低膨脹合金 Super Invar、Zerdur 和陶瓷選項）
- 多種變體可選：適用於超高真空（UHV）、輻射環境、低溫環境以及非磁性應用等需求
產品介紹
Product Introduction >> NanoSensors – NX Series
奈米定位感測器 – 提供極致位置監測的 NanoSensor
NanoSensor® 是一種基於電容微測量原理的非接觸式位置測量系統。兩個感測器板（目標板與探測板）構成一個平行板電容器。
通過適當的電子控制器，可以測量這兩個板之間的間距，其精度可達 7 皮米（pm），測量範圍最高可達 1.25 毫米，頻率響應高達 10KHz，線性度可達 0.02%。由於 NanoSensor 採用了非接觸式測量方法，因此不存在遲滯現象。此外，測量點不會有功率耗散。
技術規格
SPECIFICATIONS >> NanoSensors – NX Series
| Parameter | Value | Units | Comments | |||
|---|---|---|---|---|---|---|
| Static physical | ||||||
| Variant | NXB Series | NXC Series | NXD Series | |||
| Active area | 22.5 | 113 | 282 | mm2 | ||
| Material | AL SI | AL SI | AL SI | Note 1 | ||
| Dynamic physical (Typical values) | ||||||
| Thermal drift | 230 3 | 230 3 | 230 3 | nm K -1 | Note 2 | |
| Short range –S (10pF) | Range | 20 | 100 | 250 | μm | |
| Nominal scale factor | 2 | 10 | 25 | μm/V | ||
| Noise | <0.001 | <0.005 | <0.013 | nmrms Hz-1⁄2 | ||
| Linearity error | <0.08 | <0.05 | <0.06 | % | Note 3 | |
| Long range –L (2pF) | Range | 100 | 500 | 1,250 | μm | |
| Nominal scale factor | 10 | 50 | 125 | μm/V | ||
| Noise | <0.015 | <0.075 | <0.188 | nmrms Hz-1⁄2 | ||
| Linearity error | <0.08 | <0.03 | <0.06 | % | Note 3 | |
| Operating temperature | Controller | +10 to +50 | ºC | |||
| Sensor | +10 to +50 | ºC | ||||
| Storage temperature | 0 to +70 | ºC | ||||
| Relative humidity | 5 to 95 (non-condensing) | % | ||||
| Operating pressure | -UHV | 10-9 | T | Note 4 | ||
Notes
- Aluminium (AL) and Super Invar (SI) material available on all variants. Alternative custom materials, e.g. Stainless Steel or Invar 36 can be used. Please consult Queensgate.
- This is the thickness contribution only. It does not include the area effect.
- Linearity error can be dominated by the parallelism of the sensor faces; particularly for short range sensors. Linearity for type 4 compact sensors will have an order of magnitude higher non-linearity.
- Vacuum sensors should be baked out at 100 ºC for two days prior to installation for best vacuum compatibility.
外觀尺寸
DIMENSIONS >> NanoSensors – NX Series
產品資源
RESOURCE >> NanoSensors – NX Series中惠科技有限公司
统一编号：28376870
服务邮箱： service@totalsmart.com.tw
地址：40744 台湾台中市西屯区河南路2段262号10楼之7
Monday – Friday
8:30 am – 5:30 pm CST
导航： 
多媒体： 
台中总公司
电话：04-27080265 ∣ 传真：04-27080263
台北电话：02-89924292 ∣ 传真：02-89929426
公司网站https://www.totalsmart.tw (繁體 ∣ 简体 ∣ English)
https://www.totalsmart.com.tw (繁體)
https://www.totalsmart.com.cn (简体)
Copyright © 2025 Total-Smart Technology Co., Ltd. All Rights Reserved. | Privacy Policy | Terms of Use |