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ProScan Motorized Stage System for Semiconductor Microscope | Prior Scientific

HWL6AL12 Wafer Shuttle Stage

XY Axis Large Format Motorized Wafer Stage with Wafer Shuttle For Olympus Wafer Handling Systems

Description

 

Key features

  • Travel range of 250 x 210 mm
  • Resolution of 0.04 μm
  • Repeatability of ± 0.2 μm
  • Automatically loads and unloads wafers
  • Compatible with the ProScanTM III system and Olympus AL120 wafer handling systems.

Product Datasheet

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