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  • Image Analysis

    Image-Pro Platform

    • Image-Pro
    • Base Features
    • 2D Capture
    • 2D Measurements
    • 2D Automated Analysis
    • 3D Visualization Analysis
    • AutoQuant Deconvolution

    Image Analysis Solution

    • MA-Pro
      • Grain Size
      • Sphericity
      • Cast Iron
    • IMC Coverage
    • Cleanliness
    • CCL Resin Flow
    • Fiber Cross-Section

    Product Integration

    • Wafer Mapping & Inspection
    • Image Scanning System
    • Stage Conotrol System
    • Extend Depth Of Field
    • Defect Inspection
    • Image Measurement
    • Hardness Testing

    Packages for Image Analysis

    Image-Pro® AI
    Life Science

    Image-Pro® AI
    Materials Science

     

    2D Measure Module
    AI Deep Learning

    2D Measure Module
    Analysis Protocols

    Helpful

    • System Requirements
    • Supported File Formats
    • Version Comparison
  • Optoelectronics

    TOPCON Products

    • 2D Spectroradiometer (SR-5100 Series)
      • SR-5100 2D Spectroradiometer
      • SR-5000 2D Spectroradiometer
    • Spectroradiometer (SR Series)
      • SR-5A Spectroradiometer
      • SR-5AS Spectroradiometer
      • SR-5S Spectroradiometer
      • SR-5 Spectroradiometer
      • SR-UL2 Spectroradiometer
      • SR-NIR Near Infrared Spectroradiometer
    • Luminance Colorimeter (BM Series)
      • BM-7AC Luminance Colorimeter
      • BM-5AC Luminance Colorimeter
      • BM-9A Luminance Meter
    • 2D Luminance Colorimeter (UA Series)
      • UA-200A 2D Luminance Colorimeter
      • UA-10A Uniformity Analyzer
      • UA-20C Luminance & Chromaticity Uniformity Analyzer
      • UA-20Y Luminance Uniformity Analyzer
    • Luminance Colorimeter (RD Series)
      • RD-80SA Luminance Colorimeter
    • Illuminance Meter (IM Series)
      • IM-2D Illuminance Meter
      • IM-600/IM-600M Digital Illuminance Meter
    • Ultraviolet Meter (UVR Series)
      • UVR-T2 Industrial UV Checker
      • UVR-300 UV Radiometer
    • Topcon Calibration Service

    APACER Products

    • Spectroradiometer (Hand-held Type)
      • AL100 / AL110
      • AL250
    • Spectral Irradiance Meter (Hand-held Type)
      • Ai111
      • Ai30S
      • Ai101
      • Ai250
    • Automation Platform for Sprctorradiometer
  • Automation

    Prior Microscope Automation

    • Motorized Stages For Upright Microscopes
      • ProScan H101A Motorized Stages
      • ProScan H101F Motorized Stages
      • ProScan H105 Motorized 6" Travel Stage
      • ProScan H105F Motorized Flat Top 6" Travel Stage
      • ProScan H116 Motorized 8" Travel Stage
      • ProScan H116SPN Motorized 8" Travel Stage with Shuttle Chuck
      • ProScan HWL6AL12 Motorized 8" Travel Stage with Shuttle Chuck
      • ProScan H112 Motorized 12" Travel Stage
      • ProScan H138A Motorized Stage With 8 Slide Capacity
      • ProScan HT1111LC Hardness Testing Motorized Industrial Stage
      • OptiScan ES111 Motorized Stages
    • Motorized Stages For Inverted Microscopes
      • ProScan H117 Motorized Stage
      • ProScan HLD117 Linear Motor Ultra-precision Stage
      • OptiScan ES107 Economical Motorized Stage
    • Physiology Platforms
      •    ── XYZ Deck Physiology Platforms ──   
      • H189 High Precision XYZ Deck
      • HZ106KT1 High Precision XYZ Deck
      • HZ106KT1E High Precision XYZ Deck
      • ProScan HT11 Heavy Duty Motorized Stage
      • ZDP50 Microscope Translation Stage
      •    ── Z Deck Electrophysiology Platform ──   
      • Manual Z Deck Manual XY Stage
      • Motorized Z Deck XY Stepper Motor Stage
      • Encoded Motorized Z Deck
    • Robotic Sample Loaders
      • SL160 Robotic Slide Loader for Microscopy
      • PLW20 Robotic Well Plate Loader System
    • OpenStand® platform
      • OpenStand-V Inverted Microscopy Platform
      • OpenStand-L Large Format Microscopy Platform
      • OpenStand-U Upright Microscopy Platform
      • OpenStand-M Small Format Microscopy Platform

    Prior Imaging Components

    • Focus Mechanisms
      •    ── Piezo-driven Nanoscan ──    
      • NanoScan OP400 Piezo Objective Scanner
      • NanoScan OP800 Piezo Objective Scanner
      • NanoScan SP Piezo Z-Axis Stage
      • WP120A Single Axis Piezo Stage (12" Wafer)
      •     ── Focus Mechanisms ──    
      • FB201 Manual Focusing Block - 29mm
      • FB203 Motorized Focusing Mount - 38mm
      • FB204 / FB205 Stage Focusing Mount - 38mm
      • FB206 Stage Focusing Mount - 38mm
      • FB210 Motorized Focusing Mount - 50mm
      • FB212 Stage Focusing Mount - 50mm
      • PS3H122R Bolt-On Motorized Focus Drive
      • H275LMT Extended Travel Motorized Focus Tower
    • Laser Autofocus
      • PureFocus™850 Laser Autofocus System
    • Controllers & Joysticks
      • ProScan III Universal Multi-axis Controller
      • OptiScan III Affordable 3-Axis Controller
      • ES10ZE Single Axis Focus Controller
      • CS200 Series Joysticks
    • Filter Wheels, Turrets & Shutters
      • HF108 High-Speed 8 Position Filter Wheel
      • HF110 High-Speed 10 Position Filter Wheel
      • HF108IX3 8 Position Filter Wheel for IX3
      • HF6NTK 6 Position Motorized Turret Upgrade Kit for Nikon Ti2
      • HF202HT 25mm High Speed Shutters
    • Light Sources
      • L200 Fluorescence Microscope Illumination

    Queensgate Nanopositioning Devices

    • Nanopositioning Piezo Stages
      • NPS-X-15A/NPS-X-15B Low Profile Fast 20µm Stage
      • NPS-X-28C Titanium Ultra Fast 28µm Stage
      • NPS-Z-15A Ultra Low Drift 15µm Stage
      • SP Mini-500 Compact Sample Positioner
      • NPS-XY-100A
      • NPS-XY-100D
      • NPS-TG-7A Fast Tip Tilt
      • NanoScan OP400
      • NanoScan OP800
      • NanoScan SP Z Series
    • Precision Actuators & Translators
      • DPT-E Closed Loop Piezo Actuators
      • MTP Open Loop Piezo Actuators
      • NPS-Z-15L Ultra High Load Closed Loop 20μm Actuator
      • NPS-Z-500B Long Range 500μm Amplified Actuator
    • Nanosensors
      • NX Series Capacitive Sensors
      • NC Series Capacitive Sensors
    • Nanopositioning Control Electronics
      • NPC-D-5200 Digital Piezo Closed Loop Controller
      • NPC-D-6000 Series Digital Piezo Closed Loop Controller
    • Vacuum Compatible Products
      • DPT-E Closed Loop Piezo Actuators
      • NX Series Capacitive Sensors
      • NC Series Capacitive Sensors
      • NPS-XY-100A
      • NPS-XY-100D
      • NPS-Z-500B Long Range 500μm Amplified Actuator
      • WP120A Wafer Positioner / Scanner
    • Specialist Stages and OEM Solutions
      • NPS-XYP-250Q
      • NPS-Z-90Q
      • NPS2100-20/NPS2101
  • Microscopic

    Microscope Camera

    • Retiga CCD Family
      • MicroPublisher 6™ CCD Camera
      • Retiga R6 CCD camera
      • Retiga ELECTRO Cooled CCD camera
      • Retiga LUMO CCD camera
    • INFINITY Series Microscopy Camera
      • INFINITY 5 CMOS Microscopy Camera
      • INFINITY 8 CMOS Microscopy Camera
    • Photometrics Scientific Cameras
      • Kinetix sCMOS cameras
      • Prime 95B™ Back-illuminated sCMOS camera
      • Prime BSI™ Back-illuminated sCMOS camera
      • Prime BSI Express sCMOS camera
      • Iris Family sCMOS cameras
      • Retiga E Family Cooled & Low-Noise CMOS camera
      • Moment High Speed CMOS camera
    • MI-Cam CMOS Camera
      • MI-Cam 5 Pro 顯微鏡數位相機
      • MI-Cam 6 顯微鏡數位相機
      • MI-Cam 20 顯微鏡數位相機

    Optical Microscope

    • Evident Microscope
    • Nikon Microscope
    • Microscope Cleaning and Maintenance

    Micrometer/Reticles/Scales

    • Microscope Eyepiece Reticles
    • Stage Micrometers & Calibration
    • TEM Grids (Specimen Support Grids)
    • Precision Apertures
    • Optical Resolution Charts
    • Counting Chambers
    • Inspection Instruments & Magnified Scales
    • Film Cover Slips and Film Reticles
  • Contact
    • Contact Us

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  1. You are here:  
  2. 電動載物台
  3. HWL6AL12 半導體晶圓電動平台

Prior Scientific
產品服務專線:04-27080265 / 台中
02-89924292 / 台北

ProScan Motorized Stage System for Upright Microscope | Prior Scientific

ProScan HWL6AL12 電動平台 (8" Wafer)

XY Axis Large Format Motorized Wafer Stage with Wafer Shuttle For Olympus Wafer Handling Systems

產品介紹

INTRODUCTION >> PRIOR HWL6AL12
Introduction of PRIOR HWL6AL12-Stage HWL6AL12 Motorized-Stage on Microscope
  • 移動行程範圍為 250 mm x 210 mm
  • 解析精度(Resolution)為 0.04 µm
  • 重複性(Repeatability)為 ±0.2μm
  • 整合晶圓自動加/卸載系統 (Wafer Load & Unload)
  • 相容於 ProScan III系統,以及Olympus AL-120晶圓裝卸系統(wafer Handling Systems)
  • 控制器支援RS-232和USB連線,相容大多數第三方軟體

Prior電動台系列產品可提供最長五年的原廠保固 (請來電洽詢)

產品特色

FEATURES >> PRIOR HWL6AL12

Prior HWL6AL12 電動平台提供Wafer Shuttle行程控制,採電動穿梭式(Motorised Shuttle)設計,用於整合Olympus AL-120晶圓裝卸系統(Wafer Handler System)進行晶圓檢測應用,可大幅減少操作員的連續操作疲勞和可能造成的定位誤差,同時提高了晶圓檢查的效率。 

HWL6AL12 電動載台在與Wafer Loader進行自動加載和卸載晶圓(Loads and Unloads Wafers)的操作時,Wafer Shuttle會自動移動到正確的晶圓裝載位置並觸發裝載器(Loader)開關,同時通知裝載器在Shuttle上的Wafer Chuck已經到達指定位置並準備好接收晶圓,待晶圓從Wafer Loader轉移到Wafer Shuttle後,Wafer Chuck上的真空感應器會確認晶圓是否已放置妥當,確認沒問題後Shuttle會立即移動到預設原點位置,等待下一步的控制指令。

電動平台允許使用者以搖桿直接控制載台移動進行手動檢查操作,或者使用程式控制的模式進行全自動檢查,HWL6AL12電動平台擁有較大的行程範圍,再加上準確的重複精度和定位精度,搭配 Prior 的 ProScan®III系統使用,更可確保載台的精度、準度都達到最小誤差,最終實現更有效的晶圓檢測流程。

產品規格

SPECIFICATIONS >> PRIOR HWL6AL12
零件編號
Part Number
HWL6AL12
移動行程
Travel Range
250 mm x 210 mm
單向重覆性精度
Unidirectional Repeatability
± 0.2 µm
雙向重覆性精度
Bidirectional Repeatability
± 1.3 µm
解析度
Resolution
0.04 µm
建議速度
Suggested Speed
40 mm/s
編碼器
Encoders
N/A
馬達類別
Motor Type
200 step
螺距
Screw Pitch
2 mm
重量
Weight
9 kg
  • 規格如上表所示,詳細資訊請參閱規格說明書

產品尺寸

DIMENSIONS >> PRIOR HWL6AL12
Prior HWL6AL12 Motorized Stage Dimension

產品資源

RESOURCE >> PRIOR HWL6AL12
 HWL6AL12 ProScan Stage Datasheet
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