產品服務專線:04-27080265 ProScan Motorized Stage System for Semiconductor Microscope | Prior Scientific HWL6AL12 Wafer Shuttle Stage XY Axis Large Format Motorized Wafer Stage with Wafer Shuttle For Olympus Wafer Handling Systems Description Key features Travel range of 250 x 210 mm Resolution of 0.04 μm Repeatability of ± 0.2 μm Automatically loads and unloads wafers Compatible with the ProScanTM III system and Olympus AL120 wafer handling systems. Product Datasheet