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Prior NX系列 奈米傳感器
產品介紹
INTRODUCTION >> Prior NX 系列 奈米傳感器
Prior NX 系列 奈米傳感器，採用電容微測量技術(Capacitance Micrometry) 進行非接觸式位置測量，確保極致的解析度與穩定性。
NanoSensor® 透過目標板 (Target) 與探測板 (Probe) 形成平行板電容(Parallel Plate Capacitor)，利用高精度電子控制器測量其間距，解析度可達7pm，並具備最大 1.25mm 量測範圍。
該傳感器具備頻率響應最高達 10kHz，線性誤差低至0.02%，確保超高精度的位置監測與動態穩定性。
由於採用非接觸式測量(Non-Contact Measurement)，NanoSensor® 完全無遲滯現象(Hysteresis-Free)，並且測量點不會產生功率損耗，使其適用於極高精度與長時間穩定性的應用需求。
Prior 奈米傳感器系列產品可提供最長五年的原廠保固 (請來電洽詢)
產品特色
FEATURES >> [Product Name]- 亞奈米級位置解析度
- 零遲滯現象
- 線性誤差低至 0.02%
- 頻寬高達 10kHz
- 高熱穩定性結構（提供超低膨脹合金 Super Invar、Zerdur 和陶瓷選項）
- 多種變體可選：適用於超高真空（UHV）、輻射環境、低溫環境以及非磁性應用等需求
技術規格
SPECIFICATIONS >> NanoSensors – NX Series
| Parameter | Value | Units | Comments | |||
|---|---|---|---|---|---|---|
| Static physical | ||||||
| Variant | NXB Series | NXC Series | NXD Series | |||
| Active area | 22.5 | 113 | 282 | mm2 | ||
| Material | AL SI | AL SI | AL SI | Note 1 | ||
| Dynamic physical (Typical values) | ||||||
| Thermal drift | 230 3 | 230 3 | 230 3 | nm K -1 | Note 2 | |
| Short range –S (10pF) | Range | 20 | 100 | 250 | μm | |
| Nominal scale factor | 2 | 10 | 25 | μm/V | ||
| Noise | <0.001 | <0.005 | <0.013 | nmrms Hz-1⁄2 | ||
| Linearity error | <0.08 | <0.05 | <0.06 | % | Note 3 | |
| Long range –L (2pF) | Range | 100 | 500 | 1,250 | μm | |
| Nominal scale factor | 10 | 50 | 125 | μm/V | ||
| Noise | <0.015 | <0.075 | <0.188 | nmrms Hz-1⁄2 | ||
| Linearity error | <0.08 | <0.03 | <0.06 | % | Note 3 | |
| Operating temperature | Controller | +10 to +50 | ºC | |||
| Sensor | +10 to +50 | ºC | ||||
| Storage temperature | 0 to +70 | ºC | ||||
| Relative humidity | 5 to 95 (non-condensing) | % | ||||
| Operating pressure | -UHV | 10-9 | T | Note 4 | ||
Notes
- Aluminium (AL) and Super Invar (SI) material available on all variants. Alternative custom materials, e.g. Stainless Steel or Invar 36 can be used. Please consult Queensgate.
- This is the thickness contribution only. It does not include the area effect.
- Linearity error can be dominated by the parallelism of the sensor faces; particularly for short range sensors. Linearity for type 4 compact sensors will have an order of magnitude higher non-linearity.
- Vacuum sensors should be baked out at 100 ºC for two days prior to installation for best vacuum compatibility.
外觀尺寸
DIMENSIONS >> NanoSensors – NX Series
產品資源
RESOURCE >> NanoSensors – NX SeriesVAT Number：28376870
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