Prior Nanometer-Scale Sensors
Nanosensors are non-contact position measurement systems featuring exceptional sensitivity, operating on the principle of capacitive micrometry. These sensors can achieve picometer-level resolution with a measuring range of up to 1.25 mm, and are widely used in high-precision positioning and motion control applications.
Queensgate offers a wide range of nanopositioning sensors, including the NX Series, which feature all-metal construction and are typically available in both aluminum and super invar (ultra-low expansion alloy) versions. Other material options are also available upon request. Please contact us for more information.
These sensors can be operated using Queensgate’s advanced analog single-channel controllers, and multi-channel systems as well as custom sensor head designs can be tailored to match your specific application requirements.
Queensgate has successfully developed custom systems for high-end applications such as wafer stepping and the International Space Station. To discuss your needs, please contact us.