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ProScan Motorized Stage System for Upright Microscope | Prior Scientific

H105 Motorized Stage

XY Axis Large Format Motorized Scanning Stage For High Precision Microscope Automation


The H105 is especially well-suited for applications that typically involve large specimens.

For example, for performing scanning of a wide range of semiconductor wafers, photo masks, and printed circuit boards.

The H105 can easily accommodate 6" wafers. H105 stage are fully mapped for improved metric accuracy.

Key features

  • Suitable for most major brand microscopes.
  • 1um or better repeatability
  • Quiet and reliable
  • Wide range of sample holders
  • Optional 100nm linear scales provide the highest precision available


Uni-Directional Repeatability *(um) Min Step Size(um) Recomended speed(mm/s) Max Travel Range(mm) Weight(kg) Ball Screw Pitch(mm) Motor Type(SPR **) Encoders
(um res)
H105/2 ## +/- 0.7 0.04 24 154 x 154 5 2 200 No
HE05/2 ## +/- 0.7 0.04 24 154 x 154 5 2 200 0.1

Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.

Product Datasheet



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