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ProScan Motorized Stage System for Upright Microscope | Prior Scientific
H105 Motorized Stage
XY Axis Large Format Motorized Scanning Stage For High Precision Microscope Automation
Description
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The H105 is especially well-suited for applications that typically involve large specimens. For example, for performing scanning of a wide range of semiconductor wafers, photo masks, and printed circuit boards. The H105 can easily accommodate 6" wafers. H105 stage are fully mapped for improved metric accuracy. |
Key features
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Specifications
| Uni-Directional Repeatability *(um) | Min Step Size(um) | Recomended speed(mm/s) | Max Travel Range(mm) | Weight(kg) | Ball Screw Pitch(mm) | Motor Type(SPR **) | Encoders (um res) |
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| H105/2 ## | +/- 0.7 | 0.04 | 24 | 154 x 154 | 5 | 2 | 200 | No |
| HE05/2 ## | +/- 0.7 | 0.04 | 24 | 154 x 154 | 5 | 2 | 200 | 0.1 |
| Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing. *Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional. **S.P.R: Full steps per revolution of motor. |