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ProScan Motorized Stage System for Semiconductor Microscope | Prior Scientific

H112 Wafer Stage

XY Axis Large Format Motorized Wafer Stage For High Precision Microscope Automation


The H112 stage is ideal for scanning a wide range of semiconductor wafers, photo masks, flat panel displays and printed circuit boards.

The H112 can easily accommodate 12 inch (300 mm) wafers and works with many robot arm wafer loaders.

In addition, the H112 can be used for transmitted light applications with 250 mm x 250 mm transmitted light area.

Click here to see how a H112 stage was used in laser cutting. 

Key features

  • Suitable for most major brand microscopes.
  • 1um or better repeatability
  • Optional 100nm linear scales provide the highest resolution available.
  • Wide range of sample holders
  • 300 mm x 300 mm (12"x12") travel


Uni-Directional Repeatability *(um) Min Step Size(um) Recomended speed(mm/s) Max Travel Range(mm) Weight(kg) Ball Screw Pitch(mm) Motor Type(SPR **) Encoders
(um res)
H112/2 ## +/- 0.7 0.04 40 302 x 302 14.5 2 200 No
HE12/2 ## +/- 0.7 0.1 40 302 x 302 14.5 2 200 0.1

Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.

Product Datasheet



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