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ProScan Motorized Stage System for Semiconductor Microscope | Prior Scientific

H116 Wafer Stage

XY Axis Large Format Motorized Wafer Stage For High Precision Microscope Automation


The H116 stage is suitable for most larger microscopes and can easily accommodate 8 inch (200mm) wafers and a variety of large specimens, making it perfect for performing scanning of a wide range of semiconductor wafers, photo masks, flat panel displays, and printed circuit boards.

Key features

  • Suitable for most major brand microscopes.
  • 1um or better repeatability
  • Quiet and reliable
  • Wide range of sample holders
  • 254mm x 215 mm (10"x8.5") travel


Uni-Directional Repeatability *(um) Min Step Size(um) Recomended speed(mm/s) Max Travel Range(mm) Weight(kg) Ball Screw Pitch(mm) Motor Type(SPR **) Encoders
(um res)
H116/2 ## +/- 0.7 0.04 40 255 x 215 7.7 2 200 No
HE16/2 ## +/- 0.7 0.04 40 255 x 215 7.7 2 200 0.1

Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.

Product Datasheet



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