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ProScan Motorized Stage System for Semiconductor Microscope | Prior Scientific
H116 Wafer Stage
XY Axis Large Format Motorized Wafer Stage For High Precision Microscope Automation
Description
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The H116 stage is suitable for most larger microscopes and can easily accommodate 8 inch (200mm) wafers and a variety of large specimens, making it perfect for performing scanning of a wide range of semiconductor wafers, photo masks, flat panel displays, and printed circuit boards. |
Key features
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Specifications
| Uni-Directional Repeatability *(um) | Min Step Size(um) | Recomended speed(mm/s) | Max Travel Range(mm) | Weight(kg) | Ball Screw Pitch(mm) | Motor Type(SPR **) | Encoders (um res) |
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| H116/2 ## | +/- 0.7 | 0.04 | 40 | 255 x 215 | 7.7 | 2 | 200 | No |
| HE16/2 ## | +/- 0.7 | 0.04 | 40 | 255 x 215 | 7.7 | 2 | 200 | 0.1 |
| Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing. *Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional. **S.P.R: Full steps per revolution of motor. |