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Queensgate Nanopositioning Devices & Sensors | Nanopositioning Actuators/Translators | Prior
Prior DPT-E 系列閉迴路致動器系統
High Performance Tip Tilt Stage
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- Preloaded super-invar construction
- Capacitive sensor feedback control
- High blocking force
- Plug and play inter-changeability
- Friction free positioning providing sub nanometer repeatability
- UHV, radiation hard / cryogenic non-magnetic and high temperature variants
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| Description |
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Precision, Accuracy and Speed for the best in Nanopositioning.
Precision, The DPT-E range of actuators are designed with capacitive feedback control to give precise positioning.
A system comprising a DPT-E actuator with the fully programmable NanoScan NPC-D-6000 series or the NPC-D-5200 digital closed loop controllers are ideal for the most demanding applications . Capable of moving loads of up to 60 kg over the full travel range with low electronic noise and high linearity, giving confidence that the actuator is positioned with precision, speed and accuracy. High thermal stability super invar construction gives superior position stability. The DPT-E is designed to be a direct replacement for the high voltage DPT-C it supersedes. The travel ranges have been increased by at least 25% from the DPT-C equivalent models as well as other enhancements.
Suggested Controller
- NPC-D-5200 Digital Controller
- NPC-D-6330 Multi-channel Closed Loop Controller
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| Technical Specification |
| Parameter |
Value |
Units |
Comments |
| Static physical |
| Variant |
DPT-E-20 |
DPT-E-50 |
DPT-E-110 |
DPTE-20-UHV |
DPT-E-50- UHV |
DPT-E-1100- UHV |
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| Supersedes model |
DPT-C-S |
DPT-C-M |
DPT-C-L |
DPT-C-SUVAC |
DPT-C-MUVAC |
DPT-C-LUVAC |
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| Material |
Super Invar (0.35nm/K CTE) |
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Note 1 |
| Length |
44.2 |
76.7 |
127.8 |
42.2 |
76.7 |
127.8 |
nm |
+/- 0.3 |
| Diameter |
20 |
20 |
20 |
20 |
20 |
20 |
mm |
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| Air cable length |
2 |
2 |
2 |
1 |
1 |
1 |
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Longer on reques |
| UHV Kapton Cable Length |
N/A |
N/A |
N/A |
1 |
1 |
1 |
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Longer on reques |
| Closed loop range |
20 |
50 |
110 |
20 |
50 |
110 |
μm |
Note 2 |
| Open loop range |
26 |
66 |
145 |
26 |
66 |
145 |
μm |
Typical |
| Max force generation |
3500 |
3500 |
3500 |
3500 |
3500 |
3500 |
N |
Typical |
| Full range push force |
600 |
600 |
600 |
600 |
600 |
600 |
N |
Note 3 |
| Max pull force |
200 |
200 |
200 |
200 |
200 |
200 |
N |
Note 8 |
| Stiffness |
120 |
48 |
21 |
120 |
48 |
21 |
N/μm |
Typical |
| Response (settle) time |
<2 |
<2.5 |
<3 |
<2 |
<2.5 |
<3 |
ms |
Note 4 |
| Dynamic physical |
| Position resolution |
0.09 |
0.12 |
0.15 |
0.2 |
0.35 |
0.4 |
nm |
Note 5 |
| Storage temperature |
-50 to +100 |
-50 to +100 |
-50 to +100 |
-50 to +100 |
-50 to +100 |
-50 to +100 |
ºC |
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| Operating pressure |
1 Atm |
1 Atm |
1 Atm |
1 Atm |
10^-3 to 10^-10 Torr |
10^-3 to 10^-10 Torr |
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| Error terms (typical) |
| Linearity Error (peak to peak) |
<0.03 |
<0.03 |
<0.03 |
<0.08 |
<0.08 |
<0.08 |
% |
Note 6 |
| Repeatability (rms) |
0.5 |
0.6 |
0.8 |
0.8 |
1 |
1.2 |
nm |
Typical |
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| Datasheets |
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