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Queensgate Nanopositioning Devices & Sensors | Nanopositioning Stages | Prior

Prior MTP 開迴路致動器

MTP15/30/45/75/105

 

Prior-MTP-Open
  • 15, 30, 45, 75 or 105 μm travel options with sub-nanometer resolution
  • Low voltage
  • Compact Size
  • High Stiffness
  • Internally preloaded – high pulling force
  • VAC and UVAC Options
  • Large range of accessories
  • Metal case for protection
  • Maximum load of up to 10Kg
Description

The MTP is an internally preloaded piezoelectric open loop translation device capable of moving up to 105μm with very high resolution.

The actuators offer a very stiff design that is capable of generating blocking forces as high as 1000N (MTP-15). This characteristic enables the actuator to drive demanding loads of up to a maximum 10kg (MTP-15) in the Z-axis. Driving the MTP actuator over nominal range simply requires a 0V to 120VDC HV amplifier. However, if required, it is possible to achieve additional range by using a -30V to 150VDC capable HV amplifier.

If a small form factor and closed loop performance is required the MTP can be used in conjunction with a Queensgate’s position measurement system. This provides capacitive position sensing for sub-nanometre precision with the benefit of independent sensor placement from the actuator. This allows the freedom to mount the sensor plates at any convenient point on the host fixture.

Applications
  • Microscopy
  • Beam steering
  • Custom closed loop system configurations when used with Queensgate Nanosensors
  • Optical cavity tuning
  • Micromanipulation
  • Fine position control
  • Custom nanopositioning devices
Technical Specification
Parameter Symbol Value Units
Static physical
Variant 15  30  45  70  105
Material Stainless Steel mm
Length 30  50  70  110  150 mm
Diameter 10 mm
*Range dxp·max >15 >30 >45 >70 >105 μm
Maximum load 10 kg
Stiffness 50  25  16  10  7 N/μm
Stack capacitance 1.8  3.6  5.4  9.0  12.6 μF
Dynamic physical (Typical values)
Operating voltage -20 to +120 VDC
Operating temperature +10 to +50 °C
Storage temperature 0 to +70 °C
Relative humidity 5 to 95 (non-condensing) %
Error terms
*Hysteresis (peak to peak) δxp·hyst ≤13 %
*Linearity error (peak) δxp·lin ≤6 %

Dimensions
Prior-MTP-Open-Drawing
DataSheet

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