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Queensgate Nanopositioning Devices & Sensors | Nanopositioning Stages | Prior
Prior NPS-Z-500B-UHV 遠程載物台
High Performance Tip Tilt Stage
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| Description | ||
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The NPS-Z-500B-UHV delivers over 100um full range at 80K at UHV. The stage is designed to operate in closed loop mode using capacitive positioning sensors. The advanced flexure design results in a highly linear device with outstanding resolution, repeatability, stiffness and stability. Low off-axis errors and a high resonant frequency further enhance the performance of this advanced design.
Suggested Controller
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| Technical Specification |
| Parameter | Symbol | Value | Units | Comments |
| Static physical | ||||
| Material | Titanium and Aluminium Alloy | |||
| Size | 60 L x 49.5 W x 30 H | mm | ||
| *Closed Loop Range at Room Temperature | dzp·max | Typical:550 | μm | Note 1 |
| Resonant frequency | f0·0 | Typical:170 | Hz | Note 2 |
| *Small signal settle time | tzs·s | Typical:15 | ms | Note 3 |
| *Position noise (1σ) | δzp·n | Typical:1 | v | Note 4 |
| Error terms | ||||
| *Hysteresis (peak to peak) | δxp·hyst | Typical:0.01 Maximum:0.02 | % | Note 6 |
| *Linearity error (peak) | δxp·lin | Typical:0.02 Maximum:0.1 | % | Note 7 |
| Datasheets |
