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Queensgate Nanopositioning Devices & Sensors | Nanopositioning Stages | Prior
Prior NPS-TG-7A 高性能傾斜台
High Performance Tip Tilt Stage
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| 產品說明 | ||
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奈米定位傾斜台NPS-TG-7A已開發用於需要高速，超高精度，在光學檢查，成像系統和激光指向設備中放置反射鏡的應用。把合適的鏡子固定在平台的Tip Tilt平台上，以微弧度(micro-radian)分辨率提供> 7毫弧度的成果。
NPS-TG-7A設計用於在高速應用中以高頻寬運行。它由Invar 36製成，其低熱膨脹特性與大多數光學器件相匹配，可最大程度地減少任何熱變形，並最大程度減少任何熱位移。標準系統提供+/- 3.5 mrad的行程，但是可根據要求提供更短範圍的選擇。
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| 技術規格 |
| Parameter | Symbol | Value | Units | Comments |
| Static physical | ||||
| Material | Invar 36 | |||
| Size | 95 high x 40 diameter | mm | ||
| *Closed Loop Range | dθp·max | Minimum:7 Typical:7 | mrad | |
| * Open Loop Range | dθp·max | Minimum:7.7 Typical:8.8 | mrad | |
| *Scale factor error (1σ) | δbθ1 | Typical0.002 Specified:0.1 | % | |
| *Resonant frequency: 0g load | f0·0 | Typical2600 | Hz | |
| 15g load | f0.015 | Typical2300 | Hz | |
| Dynamic physical (Typical values) | ||||
| Loop setting | Note 1 | |||
| *3dB Bandwidth | Bθp | Extra fast:1200 Fast:800 Slow:50 | Hz | |
| *Small signal settle time | tθs.s | Fast:1.5 | ms | Note 2 |
| *Position noise (1σ) | δθp·n | Extra fast:0.5 Fast:0.36 Slow:0.08 | urads | Note 3 |
| Repeatability | Slow:0.2 | urads | ||
| Error terms | ||||
| Variant | ||||
| *Hysteresis (peak to peak) | δp·hyst | Typical:0.05 Specified:0.15 | % | Note 4 |
| *Linearity error (peak) | δp·lin | Typical:0.03 Specified:0.1 | % | Note 5 |
| Distance of pivot point to platform surface | Typical:7 | mm | X and Y axis | |
| 外觀尺寸 |
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| 產品資訊 |
