 |
產品服務專線：04-27080265 |
Queensgate Nanopositioning Devices & Sensors | Nanopositioning Sensors | Prior
Prior NX系列 奈米傳感器
NanoSensors – NX Series
 |
- Sub-nanometer position resolution
- Zero hysteresis
- Linearity error down to 0.02%
- Bandwidth up to 10 kHz
- High thermal stability construction (Super invar, zerdur and ceramic options available)
- UHV, Radiation, Cryogenic, Nonmagnetic, etc. Variants
|
|
| Description |
|
The NanoSensor® is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates, a Target and a Probe, form a parallel plate capacitor.
The spacing of these two plates can be measured using the appropriate electronic controller, to better than 7pm, with a range up to 1.25mm, a frequency response up to 10KHz and linearity down to 0.02%. Because the NanoSensor is a non-contact method, it is free from hysteresis. No power is dissipated at the point of measurement.
|
| Applications |
- Precision manufacturing
- Metrology
- Deformation measurements
- Stain measurement (used on space station robotic arm and hand)
- Stage control
- Materials testing
- Microscopy
- Active Optics
- Precision Beam Steering
|
|
|
| Technical Specification |
| Parameter |
Value |
Units |
Comments |
| Static physical |
|
Variant
|
NXB Series |
NXC Series |
NXD Series |
|
|
| Active area |
22.5 |
113 |
282 |
mm2 |
|
| Material |
AL SI |
AL SI |
AL SI |
|
Note 1 |
| Dynamic physical (Typical values) |
| Thermal drift |
230 3 |
230 3 |
230 3 |
nm K -1 |
Note 2 |
| Short range –S (10pF) |
Range |
20 |
100 |
250 |
μm |
|
| Nominal scale factor |
2 |
10 |
25 |
μm/V |
|
| Noise |
<0.001 |
<0.005 |
<0.013 |
nmrms Hz-1⁄2 |
|
| Linearity error |
<0.08 |
<0.05 |
<0.06 |
% |
Note 3 |
| Long range –L (2pF) |
Range |
100 |
500 |
1,250 |
μm |
|
| Nominal scale factor |
10 |
50 |
125 |
μm/V |
|
| Noise |
<0.015 |
<0.075 |
<0.188 |
nmrms Hz-1⁄2 |
|
| Linearity error |
<0.08 |
<0.03 |
<0.06 |
% |
Note 3 |
| Operating temperature |
Controller |
+10 to +50 |
ºC |
|
| Sensor |
+10 to +50 |
ºC |
|
| Storage temperature |
0 to +70 |
ºC |
|
| Relative humidity |
5 to 95 (non-condensing) |
% |
|
| Operating pressure |
-UHV |
10-9 |
T |
Note 4 |
|
| Dimensions |
|
|
| DataSheet |
|
|
