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Queensgate Nanopositioning Devices & Sensors | Nanopositioning Sensors | Prior

Prior NX系列 奈米傳感器

NanoSensors – NX Series

 

Prior-NX-Series
  • Sub-nanometer position resolution
  • Zero hysteresis
  • Linearity error down to 0.02%
  • Bandwidth up to 10 kHz
  • High thermal stability construction (Super invar, zerdur and ceramic options available)
  • UHV, Radiation, Cryogenic, Nonmagnetic, etc. Variants
Description

The NanoSensor® is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates, a Target and a Probe, form a parallel plate capacitor.

The spacing of these two plates can be measured using the appropriate electronic controller, to better than 7pm, with a range up to 1.25mm, a frequency response up to 10KHz and linearity down to 0.02%. Because the NanoSensor is a non-contact method, it is free from hysteresis. No power is dissipated at the point of measurement.

Applications
  • Precision manufacturing
  • Metrology
  • Deformation measurements
  • Stain measurement (used on space station robotic arm and hand)
  • Stage control
  • Materials testing
  • Microscopy
  • Active Optics
  • Precision Beam Steering
Prior-NX-Series-2 Prior-NX-Series-3 Prior-NX-Series-4
Technical Specification
Parameter Value Units Comments
Static physical

Variant

NXB Series NXC Series NXD Series
Active area 22.5 113 282 mm2
Material AL         SI AL         SI  AL         SI Note 1
Dynamic physical (Typical values)
Thermal drift  230        3 230        3 230        3 nm K -1 Note 2
Short range –S (10pF) Range 20 100 250 μm
Nominal scale factor 2 10 25 μm/V
Noise <0.001 <0.005 <0.013 nmrms Hz-1⁄2
Linearity error <0.08 <0.05 <0.06 % Note 3
Long range –L (2pF) Range 100 500 1,250 μm
Nominal scale factor 10 50 125 μm/V
Noise <0.015 <0.075 <0.188 nmrms Hz-1⁄2
Linearity error <0.08 <0.03 <0.06 % Note 3
Operating temperature Controller +10 to +50 ºC
Sensor +10 to +50 ºC
Storage temperature 0 to +70 ºC
Relative humidity 5 to 95 (non-condensing) %
Operating pressure -UHV 10-9 T Note 4

Dimensions

Prior-NX-Series-Drawing

Prior-NX-Series-Drawing-2

DataSheet

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