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產品服務專線:04-27080265 |
Queensgate Nanopositioning Devices & Sensors | Prior
Prior NPS2100-20/NPS2101 控制器
Sub-nanometer position resolution
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- 奈米等級分辨率
- 線性誤差低至0.02%
- 可調式頻寬(50Hz,500Hz或5kHz)
- 可調式放大器增益(適用於未測量整個測量範圍的應用)
- 可選擇長('-L')或短('-S')測量範圍(2pF或10pF電容)
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產品說明 |
NPS2101和NPS2100-20是NanoSensor高電壓放大器和控制電子設備,組合為一個單通道獨立模組,由外部±15V,130V和-30V直流電源供電。
用於提供Y鏡轉向系統的閉環位置控制,該機構集成了Queensgate壓電執行器(MTP-15N)和傳感器(NXB-3-Al)。
與開環操作相比,控制電子設備允許用戶優化閉環響應,從而顯著提高穩定性和線性度。NPS-2100-20帶有-20V輸入。NPS-2101具有正電壓輸入和負電壓輸入。
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技術規格 |
Parameter |
Value |
Units |
Comments |
Static physical |
Size (Width x Depth x Height) |
218 x 77 x 34 |
mm |
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Power supply |
±15 ±1 @120mA
+120 to +130 @ 30mA
-32 to -27 @ 30mA
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VDC |
Note 1 |
Sensor output |
-5 to +5 |
V |
Note 2 |
Analogue input range |
-10 to +10 |
V |
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Digital input D/A resolution |
14 |
Bits |
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NanoSensor Dynamic physical (Typical values) |
Scale factor |
0.1 or 0.01 |
GV -1 |
Note 3 |
Noise level (-S) (2100 / 2100-20) |
<0.03 |
ppmHz- 1/2 rms |
Note 4 |
Noise level (-L) (2100 / 2100-20) |
<0.15 |
ppmHz- 1/2 rms |
Note 4 |
Thermal drift |
5 |
ppmK-1 Typ |
Note 4 |
Warm-up time |
10 |
Minutes |
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Warm-up drift |
80 |
ppm |
Note 4 |
PS rejection |
10 |
ppmV-1 |
Note 4 |
Linearity error |
<0.2 |
% |
Note 5 |
Bandwidth |
50, 500, 5000 ±10% |
Hz |
Note 6 |
HV Amplifier Dynamic physical (Typical values) |
Output voltage (2100) |
0 to +120 |
V |
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Output voltage (2100-20 / 2101) |
-20 to +120 |
V |
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Bandwidth |
5 |
KHz |
Note 7 |
Analogue input gain |
6 |
V/V |
Note 8 |
Digital input gain |
7.3 m |
V/bit |
Note 8 |
Noise |
0.2 |
mVrms |
Note 9 |
Current limit |
50 |
mA |
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產品資訊 |
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