產品服務專線：04-27080265 / 台中
02-89924292 / 台北

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Queensgate's nanopositioning and nanosensor products are available in vacuum-compatible versions, typically offered as standard products. If off-the-shelf solutions do not meet your requirements, we also provide custom designs and product variants to ensure compatibility with your specific application.

Vacuum products are widely used in synchrotron, scanning electron microscopy (SEM), and aerospace applications. In ultra-high vacuum (UHV) environments, material selection and preparation are critical. UHV designs must ensure operation in vacuum conditions and may require resistance to cryogenic temperatures or radiation.

Proper material selection (e.g., radiation-resistant components) and accurate manufacturing and preparation are key. Ultrasonic cleaning effectively removes grease and carbon residues from metal parts, and bake-out procedures are recommended to eliminate solvent residues before use.

Sensors
NX NanoSensor® UHV variants are ideal for ultra-precise nanopositioning in applications such as hard disk testing, interferometry, mirror alignment, and high-resolution microscopy.
NC NanoSensor® is a high-resolution capacitive sensor designed for UHV applications down to 10^-10 Torr. Its ceramic-to-metal construction eliminates adhesives, allowing higher temperature bake-out and suitability for high-radiation environments.

Closed-Loop Actuators
The DPT-E-UHV series features capacitive feedback control for high-precision positioning. It combines thermal stability with super invar construction, making it compatible with 10^-9 Torr UHV environments.

Stages
Queensgate offers vacuum-compatible flexure-guided piezo stages with Kapton cabling. These stages are capable of sub-nanometer optical component positioning. If you need nanopositioning in high vacuum, please contact us.

DPT-E
Closed Loop Piezo Actuators

MTP
Open Loop Preloaded Piezo Actuator

NanoSensors
NC Series Capacitive Sensors

NanoSensors
NX Series Capacitive Sensors

NPS-XY-100A
Super Invar Two Axis 100µm x 100µm Stage

NPS-XY-100D
Aluminum Two Axis 100µm x 100µm Stage

NPS-Z-500B
Long Range 500 Micron Amplified Actuator

WP120A
Wafer Positioner / Scanner