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Queensgate Nanopositioning Devices & Sensors | Nanopositioning Control Electronics | Prior

Prior NS-2000 傳感器控制器

Sensor Controller

Sub-nanometre position resolution
Zero hysteresis
User adjustable measurement bandwidth (50Hz, 500Hz or 5kHz)
User adjustable amplifier gain (for applications that do not use the full measuring range)
Selectable long (‘-L’) or short (‘- S’) measuring range (2pF or 10pF capacitance)
Compact stand-alone module

Description

The NS2000 is a single channel stand-alone electronic module for driving the NX and NC NanoSensor series. It operates by measuring the change in capacitance of a parallel plate capacitor and outputs an analogue voltage proportional to the NanoSensor gap. The voltage output varies linearly between -5V and +5V as the sensor gap changes from 50% to 150% of the nominal NanoSensor gap, this scaling is user settable. Its compact size, stand alone operation and high resolution makes this ideal for upgrading existing systems where Nanopositioning is required.

Applications

Metrology
Precision engineering
Vibration measurement
Building custom closed loop Nanopositioning systems

Technical Specification

Parameter	Value	Units	Comments
Mechanical
Size (Width x Depth x Height)	218 x 77 x 34	mm
Power supply	±15 ±1	V
Current requirement	70	mA Typ
Sensor output	-5 to +5	V	Note 1
Dynamic physical (Typical values)
Scale factor	0.1 or 0.05 or 0.01	GV^-1
Noise level (-S)	<0.05	ppmHz-^1/2 rms	Note 2
Noise level (-L)	<0.15	ppmHz^-1/2 rms	Note 2
Thermal drift	5	ppmK^-1 Typ	Note 2
Warm-up time	10	Minutes
Warm-up drift	80	ppm	Note 2
PS rejection	10	ppmV^-1	Note 2
Linearity error	<0.2	%	Note 3
Bandwidth	50, 500, 5000 ±10%	Hz